Abstract: Optimiazing the running existed problems for RH dry vacuum pump system according to working principles and charateristics of dry vacuum pump. The dry vacuum pump system technology and equipment applying in RH furnace process, which is benefit for improving the RH furnace metallurgical function. Air evacuation capability, decarbonization, dehydrogenation and liquid steel cyclical speed rate are improved. The content of [C] in molten steel is less than 10 ppm after vacuum treatment for 15 min, and the content of [H] in molten steel is less than 1ppm after 20 min. The stable operation of the dry vacuum pump system, energy saving and environmental protection greatly reduce the production cost of RH process.